PAX-it!

PAX-it “CD Module” for Critical Dimension Metrology

MIS, Inc. is pleased to announce the new ‘PAX-it CD Module’, which is an optical critical dimension software tool that adds Critical Dimension Metrology to the PAX-it Image Analysis Module.

Features of this new tool include:

• Fast and repeatable measurement tool, available stand-alone or as an upgrade to any optical microscope
• Ability to set critical dimension measurements to inside edges, outside edges, or pitch measurements
• Ability to select a desired % threshold target
• Configurable Optical Profile display allows for easy viewing of edges and thresholds
• Measurement Tests can be configured and saved for repeated use
• Measure horizontal, vertical, and curved critical dimensions with reliability and repeatability
• Multiple-pass measurements allow for multiple automatic measurements within a single field of view
• Data can be exported to a spreadsheet automatically, or full measurement data reports can be generated in MS Word®, MS Excel®
• Can be bundled with the PAX-it Motorized Stage Module and Scripting for fully automated and programmed focus – capture – archive – measure – and reporting
• Ideal for process control in photolithography and related applications in Semiconductor, MEMS, Microfluidics, LED, LCD, Flat Panel Display, Photovoltaic / Solar, and similar technologies

Minimum Recommended Computer Specs: Pentium 4, 2.0 GHz processor, 1GB RAM, 150GB Hard Drive, CD/DVD Burner, USB2 Port